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Cantilever-based structures are generally preferred for use as probe tips in scanning probe microscopes because of their high spring constants and low mass. See U.S. Pat. No. 6,111,708 and U.S. Pat. No. 5,841,275, each of which is hereby incorporated by reference in its entirety. Probe tips made from materials such as silicon nitride (Si3N4) or silicon nitride oxide (Si3N4O) have been used to provide high drive forces. In such designs, the cantilever is oriented normal to the surface of the substrate, and the drive tip is placed a short distance above the cantilever tip to provide drive force.
High-spring constant cantilevers have been integrated into the fabrication of Scanning Near-field Optical Microscopes (SNOMs), where their high spring constant makes the cantilevers useful for near-field imaging. See U.S. Pat. No. 6,111,708, each of which is hereby incorporated by reference in its entirety. Scanning Super-resolution Optical Microscopy (SSOM) is an extension of near-field imaging which takes advantage of the steep near-field slope of the near-field image to produce images with increased resolution. See Opt. Lett. 27, 1363 (2002), each of which is hereby incorporated by reference in its entirety. High-spring constant cantilevers are needed to achieve high drive forces, which are required for the high-resolution imaging. However, use of conventional cantilever designs having the cantilever oriented normal to the substrate surface results in low optical reflectivity.
Scanning probe microscopes employing surfaces which are as reflective as possible for probe beam illumination are preferred. This is because the reflected probe beam is directed into the detector, where the reflected beam reaches a minimum intensity as it reflects from the probe. The minimum intensity is observed at the detector, and hence reflects a minimum intensity to the detector. It is therefore desirable to construct the probe tips to be as reflective as possible.Q:

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